Silicon photonics plays a key role in many applications ranging from communication, sensing for healthcare, defence and environmental applications, LiDAR and more. The key advantage of silicon photonics is cost. Silicon is inherently cheap, and the infrastructure to fabricate silicon devices already exists within the electronics industry, which can be exploited for low-cost silicon photonics.
This one-day hands-on training course provides industry, particularly those seeking to better understand the challenges of silicon photonics fabrication, with an opportunity to fabricate their own silicon photonics devices in a cleanroom facility.
The course will focus on three technology areas:
- Deep-UV projection lithography for patterning designed devices into a photosensitive resist layer
- Etching of silicon waveguides and removal of the resist layer
- Cladding deposition to protect the silicon waveguides
Course attendees will learn the details of how silicon photonics devices are fabricated and gain a better understanding of the tolerances involved in the fabrication processes. They will learn technologies that are comparable to volume manufacturing technologies.