Fabrication and characterization of an integrated Electro-Optic modulator
PhotonHub Demo centre
Free-Space Photonic Components and Systems Micro-Opto-Electro-Mechanical Systems (MOEMS) and Hybrid Photonics Systems Silicon-based photonic integrated circuits Silicon Nitride waveguide technology Laser-based Manufacturing
Mobility & energy Digital infrastructure Safety, security, space & defence Health

Integrated electro-optic (EO) modulators have become ubiquitous in the long-haul, high-capacity optical fiber telecommunications backbone, while they also find useful for a range of demanding applications like microwave/RF photonics, space/data communications, distributed sensing and lidar, inertial navigation, pulse shaping of industrial lasers, laser frequency stabilization and control, and now for photonic neural networks and quantum information processing.

This one-day training course provides industry with a practical know-how about all clean-room fabrication & characterization steps of an integrated LiNbO3 EO amplitude modulator. Attendees will leave the course with their fabricated demo, a 3-inch wafer fitted out with 11 patterned modulators.

The course will focus on 4 steps; 1) tutorial on the operating principle of an EO modulator; 2) fabrication of the optical waveguides by sputtering, lithography and etching; 3) fabrication of the Cr/Au thin electrodes including mask alignment. During fabrication, the devices are step-by-step quality controlled and tested; 4) optical and transmission tests of a fully packaged modulator.

  • Understanding of key features and applications of an integrated electro-optic modulator.
  • Execute all the collective on-wafer fabrication steps to produce Mach-Zehnder optical waveguides with step by step quality control (hands-on activity)
  • Achieve all the fabrication and alignment steps of Cr/Au thin electrodes with step by step quality control (hands-on activity)
  • Perform characterization of a LiNbO3 electro-optic modulator on an optical transmission bench.
Medium experience Advanced experience
It is desirable but not essential that course attendees have a basic understanding of photonics and clean-room processes. The course and its hands-on work are ideally suited to those planning to design, develop and manufacture new integrated photonic products based on clean-room fabrication and suited to applications in telecoms, sensing, signal/data and pulse processing….
clean room 0.18.34 ENSMM school of engineer
25000 Besançon
250 EUR
(includes catering and project consumables)
6-8 persons
The students work in pairs to carry out all the operations involved in making an EO modulator. The 4 pairs can thus rotate on each station without any dead time and without waiting with only one trainer. The most delicate stage corresponds to the alignment of the second mask (electrodes) on the optical guides already placed. (the max capacity is 10 personnes)